In-situ X-ray diffraction studies of time and thickness dependence of crystallization of amorphous TiO 2 thin films and stress evolution
Autor: | Kužel, R., Nichtová, L., Matěj, Z., Musil, J. |
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Zdroj: | In Thin Solid Films 2010 519(5):1649-1654 |
Databáze: | ScienceDirect |
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