In-situ X-ray diffraction studies of time and thickness dependence of crystallization of amorphous TiO 2 thin films and stress evolution

Autor: Kužel, R., Nichtová, L., Matěj, Z., Musil, J.
Zdroj: In Thin Solid Films 2010 519(5):1649-1654
Databáze: ScienceDirect