Low refractive index silicon oxide coatings at room temperature using atmospheric-pressure very high-frequency plasma
Autor: | Kakiuchi, H., Ohmi, H., Yamaguchi, Y., Nakamura, K., Yasutake, K. |
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Zdroj: | In Thin Solid Films 2010 519(1):235-239 |
Databáze: | ScienceDirect |
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