Highly conductive alumina-added ZnO ceramic target prepared by reduction sintering and its effects on the properties of deposited thin films by direct current magnetron sputtering
| Autor: | Huang, H.S., Tung, H.C., Chiu, C.H., Hong, I.T., Chen, R.Z., Chang, J.T., Lin, H.K. |
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| Zdroj: | In Thin Solid Films 2010 518(21):6071-6075 |
| Databáze: | ScienceDirect |
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