Structure and property changes of ZrO 2/Al 2O 3/ZrO 2 laminate induced by low-temperature NH 3 annealing applicable to metal–insulator–metal capacitor
| Autor: | Li, Ming-Yen, Tsai, Bin-Siang, Jiang, Pei-Chuen, Wu, Hsiao-Che, Wu, Yung-Hsien, Lin, Yu-Jen |
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| Zdroj: | In Thin Solid Films 2010 518(18):5272-5277 |
| Databáze: | ScienceDirect |
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