Effect of high-energy electron beam irradiation on the properties of AZO thin films prepared by rf magnetron sputtering
| Autor: | Yun, Eui-Jung, Jung, Jin Woo, Ko, Kyung Nam, Hwang, Jongha, Lee, Byung Cheol, Jung, Myung-Hee |
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| Zdroj: | In Thin Solid Films 2010 518(22):6236-6240 |
| Databáze: | ScienceDirect |
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