Surface characteristics of parylene-C films in an inductively coupled O 2/CF 4 gas plasma
| Autor: | Ham, Yong-Hyun, Shutov, Dmitriy Alexandrovich, Baek, Kyu-Ha, Do, Lee-Mi, Kim, Kwangsoo, Lee, Chi-Woo, Kwon, Kwang-Ho |
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| Zdroj: | In Thin Solid Films 2010 518(22):6378-6381 |
| Databáze: | ScienceDirect |
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