Multi-solvent ellipsometric porosimetry analysis of plasma-treated porous SiOCH films
| Autor: | Licitra, C., Bouyssou, R., Chevolleau, T., Bertin, F. |
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| Zdroj: | In Thin Solid Films 2010 518(18):5140-5145 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Licitra, C., Bouyssou, R., Chevolleau, T., Bertin, F. |
|---|---|
| Zdroj: | In Thin Solid Films 2010 518(18):5140-5145 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect