Formation of PTFE-like films in CF 4 microwave plasmas
| Autor: | Quade, Antje, Polak, Martin, Schröder, Karsten, Ohl, Andreas, Weltmann, Klaus-Dieter |
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| Zdroj: | In Thin Solid Films 2010 518(17):4835-4839 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Quade, Antje, Polak, Martin, Schröder, Karsten, Ohl, Andreas, Weltmann, Klaus-Dieter |
|---|---|
| Zdroj: | In Thin Solid Films 2010 518(17):4835-4839 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect