Honeycomb voids due to ion implantation in germanium
| Autor: | Kaiser, R.J., Koffel, S., Pichler, P., Bauer, A.J., Amon, B., Claverie, A., Benassayag, G., Scheiblin, P., Frey, L., Ryssel, H. |
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| Zdroj: | In Thin Solid Films 2010 518(9):2323-2325 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect