Numerical ellipsometry: Analysis of thin metal layers using n–k plane methods with multiple incidence angles
| Autor: | Urban, F.K., III a, ⁎, Barton, D. a, Tiwald, T. b |
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| Zdroj: | In Thin Solid Films 31 December 2009 518(5):1411-1414 |
| Databáze: | ScienceDirect |
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