Characterization of Arsenic segregation at Si/SiO 2 interface by 3D atom probe tomography
| Autor: | Ngamo, M., Duguay, S., Pichler, P., Daoud, K., Pareige, P. |
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| Zdroj: | In Thin Solid Films 2010 518(9):2402-2405 |
| Databáze: | ScienceDirect |
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| Autor: | Ngamo, M., Duguay, S., Pichler, P., Daoud, K., Pareige, P. |
|---|---|
| Zdroj: | In Thin Solid Films 2010 518(9):2402-2405 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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