In situ optical spectroscopy during deposition of Ag:Si 3N 4 nanocomposite films by magnetron sputtering
| Autor: | Simonot, Lionel, Babonneau, David, Camelio, Sophie, Lantiat, David, Guérin, Philippe, Lamongie, Bruno, Antad, Vivek |
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| Zdroj: | In Thin Solid Films 2010 518(10):2637-2643 |
| Databáze: | ScienceDirect |
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