Effect of gas composition on metal surface cleaning using atmospheric pressure microwave plasma
| Autor: | Ono, Shigeru, Teii, Shinriki, Suzuki, Yuta, Suganuma, Takuya |
|---|---|
| Zdroj: | In Thin Solid Films 2009 518(3):981-986 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Ono, Shigeru, Teii, Shinriki, Suzuki, Yuta, Suganuma, Takuya |
|---|---|
| Zdroj: | In Thin Solid Films 2009 518(3):981-986 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect