Correlation between hardness and stress in Al–(Nb, Mo, Ta) thin films
| Autor: | Car, T., Radić, N., Panjan, P., Čekada, M., Tonejc, A. |
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| Zdroj: | In Thin Solid Films 2009 517(16):4605-4609 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Car, T., Radić, N., Panjan, P., Čekada, M., Tonejc, A. |
|---|---|
| Zdroj: | In Thin Solid Films 2009 517(16):4605-4609 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect