Small angle X-ray scattering measurements of spatial dependent linewidth in dense nanoline gratings
| Autor: | Wang, Chengqing, Fu, Wei-En, Li, Bin, Huang, Huai, Soles, Christopher, Lin, Eric K., Wu, Wen-li, Ho, Paul S., Cresswell, Michael W. |
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| Zdroj: | In Thin Solid Films 2009 517(20):5844-5847 |
| Databáze: | ScienceDirect |
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