Investigation of atmospheric-pressure plasma deposited SiOx films on polymeric substrates
| Autor: | Huang, Chun, Liu, Chi-Hung, Su, Chun-Hsien, Hsu, Wen-Tung, Wu, Shin-Yi |
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| Zdroj: | In Thin Solid Films 2009 517(17):5141-5145 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect