Sputter deposition of ZnO thin films at high substrate temperatures
| Autor: | Eisermann, S., Sann, J., Polity, A., Meyer, B.K. |
|---|---|
| Zdroj: | In Thin Solid Films 2009 517(20):5805-5807 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Eisermann, S., Sann, J., Polity, A., Meyer, B.K. |
|---|---|
| Zdroj: | In Thin Solid Films 2009 517(20):5805-5807 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect