Degradation and silicidation of Ta- and W-filaments for different filament temperatures
| Autor: | Kniffler, N., Pflueger, A., Scheller, D., Schroeder, B. |
|---|---|
| Zdroj: | In Thin Solid Films 2009 517(12):3424-3426 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Kniffler, N., Pflueger, A., Scheller, D., Schroeder, B. |
|---|---|
| Zdroj: | In Thin Solid Films 2009 517(12):3424-3426 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect