The effect of composition on the bond structure and refractive index of silicon nitride deposited by HWCVD and PECVD
| Autor: | Verlaan, V., Verkerk, A.D., Arnoldbik, W.M., van der Werf, C.H.M., Bakker, R., Houweling, Z.S., Romijn, I.G., Borsa, D.M., Weeber, A.W., Luxembourg, S.L., Zeman, M., Dekkers, H.F.W., Schropp, R.E.I. |
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| Zdroj: | In Thin Solid Films 2009 517(12):3499-3502 |
| Databáze: | ScienceDirect |
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