Study of silicon-on-insulator substrates incorporated with buried MoSi 2 layer
| Autor: | Chen, Chao, Liu, Weili, Ma, Xiaobo, Shen, Qinwo, Song, Zhitang, Lin, Chenglu |
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| Zdroj: | In Thin Solid Films 2009 517(8):2724-2728 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect