Nucleation and growth of poly-Si films deposited directly on glass substrate in reactive thermal-chemical vapour deposition
| Autor: | Lim, Cheolhyun, Lee, Jungwoo, Hanna, Junichi |
|---|---|
| Zdroj: | In Thin Solid Films 2009 517(8):2627-2632 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect