Epitaxial growth of high- κ oxides on silicon
| Autor: | Merckling, C. a, b, Saint-Girons, G. a, Delhaye, G. a, Patriarche, G. c, Largeau, L. c, Favre-Nicollin, V. d, El-Kazzi, M. a, Regreny, P. a, Vilquin, B. a, Marty, O. a, Botella, C. a, Gendry, M. a, Grenet, G. a, Robach, Y. a, Hollinger, G. a, ⁎ |
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| Zdroj: | In Thin Solid Films 2008 517(1):197-200 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect