Microstructure difference of Ni induced poly-crystallized SiGe by changing the annealing atmosphere
| Autor: | Yamanaka, Junji, Horie, Tadashi, Mitsui, Minoru, Arimoto, Keisuke, Nakagawa, Kiyokazu, Sato, Tetsuya, Sawano, Kentarou, Shiraki, Yasuhiro, Moritani, Tomokazu, Doi, Minoru |
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| Zdroj: | In Thin Solid Films 2008 517(1):232-234 |
| Databáze: | ScienceDirect |
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