Observation of in-plane strain fluctuation in relaxed SiGe virtual substrate
| Autor: | Huang, Wu-Ping, Cheng, Henry H., Sun, Gregory, Lou, Rui-Fa, Yeh, J.H., Shen, Tzer-Min |
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| Zdroj: | In Thin Solid Films 2008 517(1):281-284 |
| Databáze: | ScienceDirect |
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