Doping concentration control of SiGe layers by spectroscopic ellipsometry
| Autor: | Fursenko, O., Bauer, J., Zaumseil, P., Yamamoto, Y., Tillack, B. |
|---|---|
| Zdroj: | In Thin Solid Films 2008 517(1):259-261 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Fursenko, O., Bauer, J., Zaumseil, P., Yamamoto, Y., Tillack, B. |
|---|---|
| Zdroj: | In Thin Solid Films 2008 517(1):259-261 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect