Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips to single crystal silicon wafers
| Autor: | Janssen, G.C.A.M., Abdalla, M.M., van Keulen, F., Pujada, B.R., van Venrooy, B. |
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| Zdroj: | In Thin Solid Films 2009 517(6):1858-1867 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect