Investigation of lanthanum and hafnium-based dielectric films by X-ray reflectivity, spectroscopic ellipsometry and X-ray photoelectron spectroscopy
| Autor: | Edon, V., Hugon, M.-C., Agius, B., Durand, O., Eypert, C., Cardinaud, C. |
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| Zdroj: | In Thin Solid Films 2008 516(22):7974-7978 |
| Databáze: | ScienceDirect |
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