Plasma erosion of tungsten films with different carbon content
| Autor: | Pranevicius, L.L., Milcius, D., Bobrovaite, B., Templier, C., Pranevicius, L. |
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| Zdroj: | In Thin Solid Films 2008 516(21):7340-7344 |
| Databáze: | ScienceDirect |
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| Autor: | Pranevicius, L.L., Milcius, D., Bobrovaite, B., Templier, C., Pranevicius, L. |
|---|---|
| Zdroj: | In Thin Solid Films 2008 516(21):7340-7344 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect