Structural and electrical properties of epitaxial Si layers prepared by E-beam evaporation
| Autor: | Dogan, P., Rudigier, E., Fenske, F., Lee, K.Y., Gorka, B., Rau, B., Conrad, E., Gall, S. |
|---|---|
| Zdroj: | In Thin Solid Films 2008 516(20):6989-6993 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect