Structure and stressed state of molybdenum layers in Mo/Si multilayers
| Autor: | Pinegyn, V.I. a, Zubarev, E.N. a, ⁎, Kondratenko, V.V. a, Sevryukova, V.A. a, Yulin, S.A. b, Feigl, T. b, Kaiser, N. b |
|---|---|
| Zdroj: | In Thin Solid Films 2008 516(10):2973-2980 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect