Large area VHF plasma production by a balanced power feeding method
| Autor: | Nishimiya, T., Takeuchi, Y., Yamauchi, Y., Takatsuka, H., Shioya, T., Muta, H., Kawai, Y. |
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| Zdroj: | In Thin Solid Films 2008 516(13):4430-4434 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect