Structural investigations of homoepitaxial Si films grown at low temperature by pulsed magnetron sputtering on Si(111) substrates
| Autor: | Fenske, F., Schulze, S., Hietschold, M., Schmidbauer, M. |
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| Zdroj: | In Thin Solid Films 2008 516(15):4777-4783 |
| Databáze: | ScienceDirect |
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