Interactions of photoresist stripping plasmas with nanoporous organo-silicate ultra low dielectric constant dielectrics
| Autor: | Lazzeri, P., Oehrlein, G.S., Stueber, G.J., McGowan, R., Busch, E., Pederzoli, S., Jeynes, C., Bersani, M., Anderle, M. |
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| Zdroj: | In Thin Solid Films 2008 516(11):3697-3703 |
| Databáze: | ScienceDirect |
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