Factors influencing adhesion of fluorocarbon (FC) thin film on silicon substrate
| Autor: | Gnanappa, Arun Kumar, Slattery, Orla, Peters, Frank, O'Murchu, Cian, O'Mathuna, Cian, Fahey, Robert, Taylor, J.A., Krupenkin, Tom N. |
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| Zdroj: | In Thin Solid Films 2008 516(16):5673-5680 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect