Effects of outgassing on the reactive sputtering of piezoelectric AlN thin films
| Autor: | Cherng, J.S., Chang, D.S. |
|---|---|
| Zdroj: | In Thin Solid Films 2008 516(16):5292-5295 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Cherng, J.S., Chang, D.S. |
|---|---|
| Zdroj: | In Thin Solid Films 2008 516(16):5292-5295 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect