Effects of outgassing on the reactive sputtering of piezoelectric AlN thin films
Autor: | Cherng, J.S., Chang, D.S. |
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Zdroj: | In Thin Solid Films 2008 516(16):5292-5295 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Cherng, J.S., Chang, D.S. |
---|---|
Zdroj: | In Thin Solid Films 2008 516(16):5292-5295 |
Databáze: | ScienceDirect |
Externí odkaz: |