Characterization of Si:O:C:H films fabricated using electron emission enhanced chemical vapour deposition
| Autor: | Durrant, Steven F., Rouxinol, Francisco P.M., Gelamo, Rogério V., Trasferetti, B. Cláudio, Davanzo, C.U., Bica de Moraes, Mario A. |
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| Zdroj: | In Thin Solid Films 2008 516(5):803-806 |
| Databáze: | ScienceDirect |
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