Cat-CVD SiN passivation films for OLEDs and packaging
| Autor: | Heya, Akira, Minamikawa, Toshiharu, Niki, Toshikazu, Minami, Shigehira, Masuda, Atsushi, Umemoto, Hironobu, Matsuo, Naoto, Matsumura, Hideki |
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| Zdroj: | In Thin Solid Films 2008 516(5):553-557 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect