Hafnium oxide thin films deposited by reactive middle-frequency dual-magnetron sputtering
| Autor: | Pervak, V., Krausz, F., Apolonski, A. |
|---|---|
| Zdroj: | In Thin Solid Films 2007 515(20):7984-7989 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Pervak, V., Krausz, F., Apolonski, A. |
|---|---|
| Zdroj: | In Thin Solid Films 2007 515(20):7984-7989 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect