Influence of sputtering parameters on crystalline structure of ZnO thin films
| Autor: | Tvarozek, V., Novotny, I., Sutta, P., Flickyngerova, S., Schtereva, K., Vavrinsky, E. |
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| Zdroj: | In Thin Solid Films 2007 515(24):8756-8760 |
| Databáze: | ScienceDirect |
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