Deposition of zirconium oxynitride films by reactive cathodic arc evaporation and investigation of physical properties
| Autor: | Laurikaitis, M., Dudonis, J., Milčius, D. |
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| Zdroj: | In Thin Solid Films 15 February 2008 516(7):1549-1552 |
| Databáze: | ScienceDirect |
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