The structure, diffusion and phase formation in Mo/Si multilayers with stressed Mo layers
| Autor: | Zubarev, E.N., Zhurba, A.V., Kondratenko, V.V., Pinegyn, V.I., Sevryukova, V.A., Yulin, S.A., Feigl, T., Kaiser, N. |
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| Zdroj: | In Thin Solid Films 2007 515(17):7011-7019 |
| Databáze: | ScienceDirect |
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