Interfacial microstructure of NiSi x/HfO 2/SiO x/Si gate stacks
| Autor: | Gribelyuk, M.A., Cabral, C., Jr., Gusev, E.P., Narayanan, V. |
|---|---|
| Zdroj: | In Thin Solid Films 2007 515(13):5308-5313 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Gribelyuk, M.A., Cabral, C., Jr., Gusev, E.P., Narayanan, V. |
|---|---|
| Zdroj: | In Thin Solid Films 2007 515(13):5308-5313 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect