Optimization of ZnSe–SiO 2 nanostructures deposited by radio-frequency magnetron sputtering: Correlations between plasma species and thin film composition, structural and microstructural properties

Autor: Morales, M., Vivet, N., Levalois, M., Bardeau, J.F.
Zdroj: In Thin Solid Films 2007 515(13):5314-5323
Databáze: ScienceDirect