Optimization of ZnSe–SiO 2 nanostructures deposited by radio-frequency magnetron sputtering: Correlations between plasma species and thin film composition, structural and microstructural properties
Autor: | Morales, M., Vivet, N., Levalois, M., Bardeau, J.F. |
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Zdroj: | In Thin Solid Films 2007 515(13):5314-5323 |
Databáze: | ScienceDirect |
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