Pulsed laser deposition and characterization of Hf-based high- k dielectric thin films
| Autor: | Sahiner, Mehmet Alper, Woicik, Joseph C., Gao, Peng, McKeown, Patrick, Croft, Mark C., Gartman, Michael, Benapfla, Brendan |
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| Zdroj: | In Thin Solid Films 2007 515(16):6548-6551 |
| Databáze: | ScienceDirect |
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