Deposition of dielectrics using a matrix distributed electron cyclotron resonance plasma enhanced chemical vapor deposition system
| Autor: | Botha, R., Haj Ibrahim, B., Bulkin, P., Drévillon, B. |
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| Zdroj: | In Thin Solid Films 2007 515(19):7594-7597 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect