Insight into excimer laser crystallization exploiting ellipsometry: Effect of silicon film precursor
| Autor: | Losurdo, Maria, Giangregorio, Maria M., Sacchetti, Alberto, Capezzuto, Pio, Bruno, Giovanni, Mariucci, Luigi, Fortunato, Guglielmo |
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| Zdroj: | In Thin Solid Films 2007 515(19):7508-7512 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect