Filtered vacuum arc deposition of transparent conducting Al-doped ZnO films

Autor: Zhitomirsky, V.N., Çetinörgü, E., Adler, E., Rosenberg, Yu., Boxman, R.L., Goldsmith, S.
Zdroj: In Thin Solid Films 2006 515(3):885-890
Databáze: ScienceDirect
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