Epitaxial growth of CoSi2 on Si(001) by reactive deposition epitaxy: Island growth and coalescence
| Autor: | Lim, C.W., Petrov, I., Greene, J.E. |
|---|---|
| Zdroj: | In Thin Solid Films 5 December 2006 515(4):1340-1348 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Lim, C.W., Petrov, I., Greene, J.E. |
|---|---|
| Zdroj: | In Thin Solid Films 5 December 2006 515(4):1340-1348 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect