TaSiN diffusion barriers deposited by reactive magnetron sputtering
| Autor: | Letendu, F., Hugon, M.C., Agius, B., Vickridge, I., Berthier, C., Lameille, J.M. |
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| Zdroj: | In Thin Solid Films 2006 513(1):118-124 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Letendu, F., Hugon, M.C., Agius, B., Vickridge, I., Berthier, C., Lameille, J.M. |
|---|---|
| Zdroj: | In Thin Solid Films 2006 513(1):118-124 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect