Thermo-mechanical evolution of multilayer thin films: Part I. Mechanical behavior of Au/Cr/Si microcantilevers
| Autor: | Miller, David C., Herrmann, Cari F., Maier, Hans J., George, Steven M., Stoldt, Conrad R., Gall, Ken |
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| Zdroj: | In Thin Solid Films 2007 515(6):3208-3223 |
| Databáze: | ScienceDirect |
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